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Box Coaters
| A 1100Q |
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| Описание: |
Chamber Used for evaporation for thin optical films (2) resistive source No E-beam or Ion Mill LH2 chamber measures 43x43x43 Technically not a "Box" coater, more of cylindrical Does not have an 8" penetration It is diffusion pumped The following items were disposed of upon decontamination: Resistance heater assembly Throat baffle Heater array Resistive posts (2) Internal cooling shields Coating materials and gases used during process: Thorium Fluoride Germanium Zinc Sulfide Decontamination process: Wire brush, sanding and scouring to eliminate trace Alpha particles from the Thorium Fluoride Pumping systems: Leybold diffusion pump No roughing pump Tooling included: spider dome frame and one set of tooling, 1/4 round shields, (2) resistive sources. Dome substrate rotation Diffusion Pump Type: 22686 Roughing pump: DK200 with Blower WS500 Last run in 2005 Decommissioned Decontaminated Can be inspected 1983 vintage As is. |
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