AZ700Q

EB-gun box coater, completely refurbished in Q4 2008 Refurbishment includes: Complete new Electric and Electronic New Visualization New Vacuum Pumps Overhaul  of all Vacuum Valves Overhaul of Magnetrons, Evaporators and drive system. Change of Bearings and O-Rings Overhaul of water manifold New external paint Hardware: Chamber: Stainless Steel Layer Measuring / Rate Control: Quarz Crystal & Optical Monitor OMD-8000 System is equiped with an intermittend direct monitoring on the substrate holder. EB-Gun: 2 x 6kW, 1 / 2 or 4 Pocket Crucible HV Power Supply: 8 kW Substrate Heater: Quarz Heater below Glowing Device: 2000 V, 2 kW Ion source: End-Hall Ion source, D=100 mm Thermal Evaporator: Boat Type 4 kVA, 12 V Substrate Drive: Synchronized Top Drive with Substrate Holders (Calotte)   Vacuum system: Fore Pump: 1 x H&P TRP 90 (new!) High Vacuum Pump: 1 x Turbo pump 1500 l/s Baffle: Liquid Nitrogen Cold Trap: Option Vacuum Gauges: 2 x Pirani TTR90, 1 x Pfeifer IMR265 Flow Controller: 100 mln/min Water Manifold: Complete Manifold includes Sensors Control System: LayOp Control System and Plant Visualisation for Multi-Layers End-user client currently uses it for R&D and internal testings of their measuring system 1988 vintage.