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По названию устройства
Box Coaters
| A700Q |
(нажмите для увеличения) |
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| Описание: |
EB-gun box coater, completely refurbished in Q4 2008 Refurbishment includes: Complete new Electric and Electronic New Visualization New Vacuum Pumps Overhaul� of all Vacuum Valves Overhaul of Magnetrons, Evaporators and drive system. Change of Bearings and O-Rings Overhaul of water manifold New external paint Hardware: Chamber: Stainless Steel Layer Measuring / Rate Control:�Quarz Crystal EB-Gun: 6 (6kW), 1 / 2 or 4 Pocket Crucible HV Power Supply: 8 kW Substrate Heater: Quarz Heater below Glowing Device:�2000 V, 2 kW Thermal Evaporator: Boat Type 4 kVA, 6 V or 12 V Substrate Drive: Top Drive with Substrate Holders (Calotte) � Vacuum system: Fore Pump:�1 x H&P TRP 90 Diffusion Pump:�1 x DI 3000 (Leybold) Baffle: Liquid Nitrogen Cold Trap: Option Vacuum Gauges:�2 x Pirani TTR90,�1 x Pfeifer IMR265 Flow Controller: 100 mln/min Water Manifold: Complete Manifold includes Sensors Control System: LayOp Control System and Plant Visualisation for Multi-Layers 1988 vintage. |
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